1. Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wyspianskiego 27, 50-370 Wroclaw, Poland
2. BOHAMET S.A., Torunska 2, 86-005 Ciele, Poland
3. Faculty of Mechanical Engineering, University of Technology and Life Sciences in Bydgoszcz, Kaliskiego 7, 85-796 Bydgoszcz, Poland