1. School of Nano-Tech and Nano-Bionics , University of Science and Technology of China , Hefei 230026 , China
2. Key Laboratory of Nano-Devices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS) , Suzhou 215123 , China
3. Guangdong Institute of Semiconductor Micro-nano Manufacturing Technology , Foshan 528000 , China
4. School of Electronic Science and Engineering , Nanjing University , Nanjing 210093 , China