MICROSTRUCTURE OF CERAMIC THICK FILM FORMED BY AEROSOL DEPOSITION AND ITS APPLICATIONS TO MICROACTUATOR-Reference-Cited by-同舟云学术

MICROSTRUCTURE OF CERAMIC THICK FILM FORMED BY AEROSOL DEPOSITION AND ITS APPLICATIONS TO MICROACTUATOR

Published:2006-11 Issue:1 Volume:80 Page:55-65
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

AKEDO JUN¹

Affiliation:

1. a National Institute of Advanced Industrial Science and Technology (AIST) 1-2-1 Namiki , Tsukuba, 305-8564, Japan

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580600656221

Reference27 articles.

1. Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr52/Ti48)O3) Thick Films Deposited by Aerosol Deposition Method

2. Jet molding system for realization of three-dimensional micro-structures

3. Proc. Micro MAT. 1997, Berlin, Germany. Vol. 614, pp.16–18.

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