FABRICATION OF PZT THIN FILMS WITH TiOx BUFFER LAYERS BY RF MAGNETRON SPUTTERING-Reference-Cited by-同舟云学术

FABRICATION OF PZT THIN FILMS WITH TiOx BUFFER LAYERS BY RF MAGNETRON SPUTTERING

Published:2006-11 Issue:1 Volume:80 Page:281-288
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

ZHONG CHAOWEI¹,PENG JIAGEN¹²,ZHANG SHUREN¹,ZHANG WANGLI¹

Affiliation:

1. a School of Microelectronics and Solid-State Electronics, University of Electronic Science and Technology of China , Chengdu, 610054, China

2. b Institution of Electronic Engineering, China Academy of Engineering Physics , Mianyang, 621900, China

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580600659829

Reference15 articles.

1. Preparation of lead zirconate titanate thin films by reactive magnetron co-sputtering

2. Enhanced performance of pyroelectric microsensors through the introduction of nanoporosity

3. Electrical properties of sputtered PZT films on stabilized platinum electrode

4. Orientation control of textured PZT thin films sputtered on silicon substrate with TiOx seeding

5. Preparation and properties of lead-zirconate-titanate ferroelectric thin films using radio frequency planar magnetron sputtering

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1. Research on pyroelectric enhancement mechanism of PZT thin films and optimization design of infrared detectors;Journal of Physics: Conference Series;2024-04-01

2. Preparation and characterization of lead zirconate titanate thin films grown by RF magnetron sputtering for pyroelectric infrared detector arrays;Ceramics International;2018-11

3. INFLUENCE OF ADHESION LAYERS ON THE SURFACE MORPHOLOGY OF PLATINUM-BASED BOTTOM ELECTRODES FOR Pb(Zr,Ti)O3 THIN FILMS;Surface Review and Letters;2011-02

4. Structural, electrical and mechanical properties of magnetron sputtered NiTi/PZT/TiOx thin film heterostructures;Surface and Coatings Technology;2011-02

5. Oxides, Oxides, and More Oxides: High-κ Oxides, Ferroelectrics, Ferromagnetics, and Multiferroics;Critical Reviews in Solid State and Materials Sciences;2009-11-30