Orientation control of textured PZT thin films sputtered on silicon substrate with TiOx seeding
Author:
Publisher
Elsevier BV
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference22 articles.
1. Ferroelectric Memories
2. An experimental 512-bit nonvolatile memory with ferroelectric storage cell
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4. Fatigue and retention in ferroelectric Y‐Ba‐Cu‐O/Pb‐Zr‐Ti‐O/Y‐Ba‐Cu‐O heterostructures
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3. Synthesis, Microstructure and Properties of Magnetron Sputtered Lead Zirconate Titanate (PZT) Thin Film Coatings;Coatings;2021-08-07
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