Role of Ultra Thin SiOx Layer on Epitaxial YSZ/SiOx/Si Thin Film-Reference-Cited by-同舟云学术

Role of Ultra Thin SiOx Layer on Epitaxial YSZ/SiOx/Si Thin Film

Published:2003-01 Issue:1 Volume:51 Page:51-61
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Kiguchi Takanori¹,Wakiya Naoki²,Shinozaki Kazuo²,Mizutani Nobuyasu¹

Affiliation:

1. a Center for Advanced Materials Analysis , Tokyo Institute of Technology , 2-12-1, O-okayama, Meguro-ku, Tokyo, 152-8550, Japan

2. b Department of Metallurgy and Ceramics Science, Graduate School of Science and Engineering , Tokyo Institute of Technology , 2-12-1, O-okayama, Meguro-ku, Tokyo, 152-8552, Japan

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584580390229815

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