Author:
Touboltsev V. S.,DybkjÆr G.,Johansen A.,Johnson E.,Sarholt L.,Andersen H. H.,Olsen M.
Subject
Metals and Alloys,Physics and Astronomy (miscellaneous),Condensed Matter Physics,General Materials Science,Electronic, Optical and Magnetic Materials
Cited by
4 articles.
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1. Sputtering transients for some transition elements during high-fluence MEVVA implantation of Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2001-02
2. Oscillations of sputtering yield;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2000-12
3. High-fluence Co implantation in Si, SiO2/Si and Si3N4/Si;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-11
4. Sputtering Yields;Topics in Applied Physics