Bombardment induced light emission from silicon, silicon nitride and silicon carbide surfaces
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00337577708237452
Reference29 articles.
1. Photon emission from sputtered particles during ion bombardment
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3. A chemical effect on light emission from ion-bombarded copper and aluminum surfaces
4. Bombardment-induced photon emission from Al and Al2O3 targets
5. Effects of nonradiative de-excitation of excited sputtered atoms near silicon and silicon dioxide surfaces
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1. Light emission from ion-bombarded Ge(100) surfaces under continuous germane and silane exposures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-04
2. Ion-bombardment induced light emission from Si(100) surfaces under continuous germane exposures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2005-08
3. Ion-bombardment induced light emission from Si(100) surfaces under continuous silane exposures;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2004-09
4. Desorption Cross Section of an Adsorbed Oxygen Atom on an Al Surface by Ar+Bombardment;Journal of the Physical Society of Japan;2002-12-15
5. Investigation of relative sputtering yields during ionoluminescence of Si;Applied Surface Science;1999-08
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