Copper single crystal sputtering in the temperature range from 50K to 600K
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00337577108230424
Reference31 articles.
1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
2. Single-crystal sputtering including the channeling phenomenon
3. Evidence against Focused Chains in High-Yield Copper Sputtering
4. Effect of Elevated Temperatures on Sputtering Yields
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