E-beam Lithography for Digital Holograms
Author:
Publisher
Informa UK Limited
Subject
Atomic and Molecular Physics, and Optics
Link
http://www.tandfonline.com/doi/pdf/10.1080/09500349314550761
Reference26 articles.
1. Fabricating binary optics: Process variables critical to optical efficiency
2. Computer aided design of computer generated holograms for electron beam fabrication
3. Electron optical column for high speed nanometric lithography
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