An Improvement of Scanning Ellipsometer by Rotating a Polarizer and an Analyzer at a Speed Ratio of 1:3
Author:
Publisher
Informa UK Limited
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Instrumentation
Link
http://www.tandfonline.com/doi/pdf/10.1080/15599612.2011.559685
Reference23 articles.
1. Optical properties of ZnSe
2. Development of Multichannel Ellipsometry with Synchronously Rotating Polarizer and Analyzer
3. Fourier transform detection system for rotating-analyzer ellipsometers
4. Precision Bounds to Ellipsometer Systems
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