Detection and clustering of mixed-type defect patterns in wafer bin maps
Author:
Affiliation:
1. SK hynix, Icheon, Gyeonggi, Republic of Korea
2. Department of Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, Republic of Korea
Funder
National Research Foundation of Korea
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/24725854.2017.1386337
Reference35 articles.
1. Mixtures of Dirichlet Processes with Applications to Bayesian Nonparametric Problems
2. Classification of run-length encoded binary data
3. Wafer defect pattern recognition by multi-class support vector machines by using a novel defect cluster index
4. A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence
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