Basic deposition process and ferroelectric properties of sputtered PLZT thin films

Author:

Wasa K.,Adachi H.,Kitabatake M.

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Hot-Pressed (Pb,La)(Zr,Ti)O3Ferroelectric Ceramics for Electrooptic Applications

2. Optical TIR switches using PLZT thin-film waveguides on sapphire

3. Land, C. E., Bultler, M. A. and Martin, S. J. Proc. of 1989 International Electron Devices Meeting. Washington, DC IEDM-251

4. Phase Relations in the AuCu1-yAgyand Au(Cu1-yAgy)3Ternary Systems

5. Iijima, K., Kawashima, S. and Ueda, I. 1989.Proc. of 1989 The 3rd Sensor Symp., Tsukuba133

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1. Ferroelectric Thin Films;Handbook of Sputtering Technology;2012

2. Structural Control of Compound Thin Films: Perovskite and Nanometer Oxide Thin Films;Thin Film Materials Technology;2004

3. Effects of cooling rates on the crystal orientation of sputtered Pb-Ti-O thin films;Superconducting and Related Oxides: Physics and Nanoengineering IV;2000-09-06

4. Modified ferroelectric properties of the single c-domain/single crystal PbTiO 3 thin films with tightly bonded interface;Superconducting and Related Oxides: Physics and Nanoengineering IV;2000-09-06

5. Interfacial structure and ferroelectric properties of PZT/SrRuO3 heterostructures on miscut (001)SrTiO3;Integrated Ferroelectrics;1999-10

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