A piezoelectric gyroscope based on thickness-shear modes of an AlN bimorph with inclinedc-axes

Author:

Cui Jing,Du Jianke,Wang Ji,Yang Jiashi

Publisher

Informa UK Limited

Subject

Condensed Matter Physics

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Shear mode bulk acoustic wave type gyroscope based on c-axis tilted ScAlN piezoelectric films;2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2023-03-28

2. c-Axis parallel ZnO piezoelectric multilayer for BAW gyroscope applications;2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL);2023-03-28

3. A piezoelectric gyroscope with tilted c-axis ScAlN thin-films;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

4. IBAD c-axis parallel ZnO piezoelectric film stack for gyroscope applications;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

5. Interaction between bending and mobile charges in a piezoelectric semiconductor bimorph;Applied Mathematics and Mechanics;2022-07-29

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