1. State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, Guangdong, China
2. Jihua Laboratory, Foshan, Guangdong, China
3. State Key Laboratory of Advanced Materials and Electronic Components, Fenghua Advanced Technology Co. Ltd, Zhaoqing, Guangdong, China
4. Guangdong Fozhixin Microelectronics Technology Research Co. Ltd, Foshan, Guangdong, China
5. Beijing Compo Advanced Technology Co. Ltd, Beijing, China