Sensitivity analysis for indirect measurement in scatterometry and the reconstruction of periodic grating structures
Author:
Publisher
Informa UK Limited
Subject
General Physics and Astronomy,General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/17455030701481823
Reference41 articles.
1. Ellipsometric scatterometry for the metrology of sub-01-μm-linewidth structures
2. Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring
3. Metrology of subwavelength photoresist gratings using optical scatterometry
4. Multiparameter grating metrology using optical scatterometry
5. Wurm, M., Bodermann, B. and Mirandé, W. Evaluation of scatterometry tools for critical dimension metrology. DGaO Proceedings. pp.106
Cited by 25 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fast scatterometric measurement of periodic surface structures in plasma-etching processes;Measurement;2021-01
2. Parametric sensitivity analysis as an essential ingredient of spectroscopic ellipsometry data modeling: An application of the Morris screening method;Journal of Applied Physics;2019-11-14
3. Automatic feature selection in EUV scatterometry;Applied Optics;2019-07-24
4. Measurement configuration optimization for dynamic metrology using Stokes polarimetry;Measurement Science and Technology;2018-04-16
5. Probing optimal measurement configuration for optical scatterometry by the multi-objective genetic algorithm;Measurement Science and Technology;2018-03-14
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3