Modeling of metastable phase formation diagrams for sputtered thin films
Author:
Affiliation:
1. Materials Chemistry, RWTH Aachen University, D-52074 Aachen, Germany
Publisher
Informa UK Limited
Subject
General Materials Science
Link
https://www.tandfonline.com/doi/pdf/10.1080/14686996.2016.1167572
Reference53 articles.
1. Microstructural evolution during film growth
2. The development of grain structure during growth of metallic films
3. Fundamental structure forming phenomena of polycrystalline films and the structure zone models
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