1. Graduate Institute of Precision Engineering, National Chung Hsing University 1 , Taichung 402, Taiwan
2. REMElab, Faculty of Mechanical Engineering, Ho Chi Minh City University of Technology and Education 2 , Ho Chi Minh 70000, Vietnam
3. Taiwan ASML Technology Taiwan Ltd. 3 , Hsinchu City 300, Taiwan
4. Industrial and Smart Technology Program, Academy of Circular Economy, National Chung Hsing University 4 , Nantou 540, Taiwan