Removal of Nano-sized Particles Using Carbon Dioxide (CO2) Gas Cluster Cleaning without Pattern Damage-Reference-Cited by-同舟云学术

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Removal of Nano-sized Particles Using Carbon Dioxide (CO2) Gas Cluster Cleaning without Pattern Damage

Published:2015-08-11 Issue:5 Volume:33 Page:558-561
ISSN:0272-6351
Container-title:Particulate Science and Technology
language:en
Short-container-title:Particulate Science and Technology

Author:

Kim Min-Su,Kim Taesung,Park Jin-Goo

Publisher

Informa UK Limited

Subject

General Chemical Engineering

Link

http://www.tandfonline.com/doi/pdf/10.1080/02726351.2015.1060651

Reference13 articles.

1. Generation of nano-sized Ar–N2 compound particles by homogeneous nucleation and heterogeneous growth in a supersonic expansion

2. Principles and mechanisms of sub-micrometer particle removal by CO2 cryogenic technique

3. Development of CO2 gas cluster cleaning method and its characterization

4. Supersonic attrition nozzles in gas–solid fluidized beds

5. Cluster Formation in Expanding Supersonic Jets: Effect of Pressure, Temperature, Nozzle Size, and Test Gas

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Removal of Contaminant Nanoparticles with $$\hbox {CO}_2$$ Nanobullets at Atmospheric Conditions;International Journal of Precision Engineering and Manufacturing-Green Technology;2019-12-17

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