The temperature dependence of the sputtering yield of noble metals-Reference-Cited by-同舟云学术

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The temperature dependence of the sputtering yield of noble metals

Published:1993-01 Issue:1 Volume:67 Page:97-105
ISSN:1364-2812
Container-title:Philosophical Magazine B
language:en
Short-container-title:Philosophical Magazine B

Author:

Lee Hee Yong¹²,Chang Hong Young³

Affiliation:

1. a Department of Physics , Korea Advanced Institute of Science and Technology , Taejon-shi , 400 , South Korea

2. c Chung-Ryang , P.O. Box 228, Seoul , 130650 , South Korea

3. b Department of Physics , Kangwon National University , Chunchon, Kangwon , 200 , South Korea

Publisher

Informa UK Limited

Subject

General Physics and Astronomy,General Chemical Engineering

Link

https://www.tandfonline.com/doi/pdf/10.1080/13642819308230221

Reference30 articles.

1. Collection and sputtering experiments with noble gas ions

2. The Z1dependence of heavy-ion sputtering yield in copper

3. Nonlinear effects in heavy‐ion sputtering

4. Secondary ion mass spectrometry of metal halides. 2. Evidence for structure in alkali iodide clusters

5. The energy dependence of gold selfsputtering

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Differential characteristics of the particles sputtered by gas cluster ions at elevated temperatures. Molecular dynamics simulation;Vacuum;2024-04

2. Cu self-sputtering MD simulations for 0.1–5 keV ions at elevated temperatures;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2018-01

3. Influence of ion source configuration and its operation parameters on the target sputtering and implantation process;Review of Scientific Instruments;2012-06

4. Effects of substrate temperature and annealing temperature on the formation and properties of erbium silicide layers synthesized by high current Er ion implantation;Journal of Applied Physics;2003-07

5. Growth and Characterization of Erbium Silicides Synthesized by Metal Vapor Vacuum Arc Ion Implantation;MRS Proceedings;2000

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