Electronic properties of amorphous and microcrystalline silicon prepared in a microwave plasma from SiF4
Author:
Affiliation:
1. a Carnegie Laboratory of Physics , University of Dundee , Dundee DD1 4HN, Scotland
Publisher
Informa UK Limited
Subject
General Physics and Astronomy,General Chemical Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/13642819108217878
Reference24 articles.
1. Recombination processes ina-Si:H: Spin-dependent photoconductivity
2. Determination of the recombination rate constants in amorphous silicon from double-injection experiments
3. The extended-state hole mobility in amorphous silicon
4. Determination of the extended-state electron mobility in a-Si
5. Low pressure microwave glow discharge process for high deposition rate amorphous silicon alloy
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. From amorphous to microcrystalline silicon: Moving from one to the other by halogenated silicon plasma chemistry;Philosophical Magazine;2009-10
2. Microcrystalline silicon by plasma enhanced chemical vapor deposition from silicon tetrafluoride;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2001-03
3. Growth of amorphous-layer-free microcrystalline silicon on insulating glass substrates by plasma-enhanced chemical vapor deposition;Applied Physics Letters;1997-09-15
4. Improvement of Electronic Transport Characteristics of Amorphous Silicon by Hydrogen Dilution of Silane;Japanese Journal of Applied Physics;1995-06-15
5. Improved fluorinated hydrogenated amorphous silicon alloys prepared using the hot-plasma-box glow-discharge technique;Philosophical Magazine B;1994-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3