Critical thickness and surface oxidation of epitaxial AIN thin films
Author:
Affiliation:
1. a Research Department , Electronics and Telecommunications Research Institute , Taejon, 305-350, Korea
2. b Department of Physics , Pusan National University , Pusan, 609-735, Korea
Publisher
Informa UK Limited
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/10584589908215585
Reference11 articles.
1. Microstructure and thermal conductivity of epitaxial AlN thin films
2. GaN, AlN, and InN: A review
3. High quality epitaxial aluminum nitride layers on sapphire by pulsed laser deposition
4. Epitaxial growth in large‐lattice‐mismatch systems
5. A crystallographic model of (00⋅1) aluminum nitride epitaxial thin film growth on (00⋅1) sapphire substrate
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