Effect of base electrode on the crystallization and electrical properties of PLT-Reference-Cited by-同舟云学术

Effect of base electrode on the crystallization and electrical properties of PLT

Published:1997-01 Issue:1-4 Volume:14 Page:211-217
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Grill A.¹,Laibowitz R.¹,Beach D.²,Neumayer D.¹,Duncombe P. R.¹

Affiliation:

1. a IBM Research Division, T.J. Watson Research Center , Yorktown Heights , N.Y. , 10598 , U.S.A.

2. b ORNL , Oak Ridge , TN , 37831-6197 , USA

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589708019994

Reference6 articles.

1. Silicon self-diffusion in thin SiO2 and PtSi films

2. Base electrodes for high dielectric constant oxide materials in silicon technology

3. Difference in microstructure between PZT thin films on Pt/Ti and those on Pt

4. Pt/Ti/SiO2/Si substrates

5. Platinum alloys and iridium bottom electrodes for perovskite based capacitors in dram applications

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