Difference in microstructure between PZT thin films on Pt/Ti and those on Pt-Reference-Cited by-同舟云学术

Difference in microstructure between PZT thin films on Pt/Ti and those on Pt

Published:1995-03 Issue:1-2 Volume:8 Page:89-98
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Hase Takashi¹,Sakuma Toshiyuki¹,Amanuma Kazushi¹,Mori Toru¹,Ochi Atsushi¹,Miyasaka Yoichi¹

Affiliation:

1. a NEC Corporation , Miyamae-ku, Kawasaki, 216, Japan

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584589508012303

Reference5 articles.

1. Spierings , G. A. C. M. van Zon , J. B. A. Klee , M. and Larsen , P. K. 1992. Proc. 4th International Symposium on Integrated Ferroelectrics. 1992. pp.280

2. Effects of anneal ambients and Pt thickness on Pt/Ti and Pt/Ti/TiN interfacial reactions

3. Al-Shareef , H. N. Gifford , K. D. Hren , P. D. Rou , S. H. Auciello , O. and Kingon , A. I. 1992. Proc. 4th International Symposium on Integrated Ferroelectrics. 1992. pp.181

4. Investigation of Pt/Ti bilayer metallization on silicon for ferroelectric thin film integration

5. Ferroelectric Properties of Sol-Gel Derived Pb(Zr, Ti)O3Thin Films

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