A review of composition-structure-property relationships for PZT-based heterostructure capacitors

Author:

Auciello Orlando12,Gifford Kenneth D.2,Lichtenwalner Daniel J.2,Dat Rovindra2,Al-Shareef Husam N.1,Bellur Kashyap. R.2,Kincon Angus I.2

Affiliation:

1. a MCNC, Electronics Technology Division , Research Triangle Park, NC, 27709

2. b N.C. State University, Materials Science and Engineering , Raleigh, NC, 27695

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Electrical and reliability properties of PZT thin films for ULSI DRAM applications

2. Miyasaka , Y. Sakuma , T. Matsubara , S. Watanabe , H. and Koyama , K. 1992. “Proceedings of the 4th International Symposium on Integrated Ferroelectrics”. Edited by: Paz de Araujo , C. A. Colorado Springs: University of Colorado Press.

3. An experimental 512-bit nonvolatile memory with ferroelectric storage cell

4. Ferroelectric Memories

5. Integrated sol-gel PZT thin-films on Pt, Si, and GaAs for non-volatile memory applications

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