Nanostructures Fabrication on Ta Thin Film Using Atomic Force Microscope Lithography
Author:
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
http://www.tandfonline.com/doi/pdf/10.1080/15421400500369484
Reference5 articles.
1. Fabrication of 0.1 μm metal oxide semiconductor field‐effect transistors with the atomic force microscope
2. Fabrication of nanometer‐scale side‐gated silicon field effect transistors with an atomic force microscope
3. Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers
4. Nanofabrication of Titanium Surface by Tip-Induced Anodization in Scanning Tunneling Microscopy
5. Chemical Approach to High-Resolution Patterning on Self-Assembled Monolayers Using Atomic Force Microscope Lithography
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