The Groove Profile Formation of Holographic Gratings
Author:
Affiliation:
1. a Department of Physics II and Institute of Optical Research, Royal Institute of Technology, S-100 44 Stockholm, Sweden
Publisher
Informa UK Limited
Subject
Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/713820753
Reference11 articles.
1. Electromagnetic Theory of Gratings
2. Modulation Transfer Function of AZ111 Photoresist
3. Profile formation in holographic diffraction gratings
4. Fabrication of thin periodic structures in photoresist: a model
5. Analysis of Two-Dimensional Etching Effect on the Profiles of Fine Holographic Grating Made of Positive Photoresist AZ2400
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