Groove Profile Prediction of Grating Masks in Scanning Beam Interference Lithography
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Published:2018
Issue:5
Volume:38
Page:0505001
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ISSN:0253-2239
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Container-title:Acta Optica Sinica
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language:en
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Short-container-title:光学学报
Author:
Lu Sen 鲁森,Yang Kaiming 杨开明,Zhu Yu 朱煜,Wang Leijie 王磊杰,Zhang Ming 张鸣
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials