Energy Analysis in Semiconductor Manufacturing
Author:
Affiliation:
1. a West Virginia University (WVU)
2. b Sieben Energy Associates , Chicago, Illinois
3. c Lane department of Computer Science and Electrical Engineering (LCSEE) , West Virginia University (WVU)
Publisher
Computers, Materials and Continua (Tech Science Press)
Subject
Energy Engineering and Power Technology,Building and Construction,Renewable Energy, Sustainability and the Environment
Link
https://www.tandfonline.com/doi/pdf/10.1080/01998591009709867
Reference11 articles.
1. Edition 15;Naughton P.,2001
2. Pennsylvania State University. 2004. “Nanofabrication Facility,”. PA: Research Park, State College.
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