Ion beam etching of dense and porous PZT films
Author:
Affiliation:
1. MIREA – Russian Technological University, Moscow, Russia;
2. Institute of Nanotechnology of Microelectronics, Russian Academy of Science, Moscow, Russia
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/00150193.2019.1598188
Reference19 articles.
1. Ferroelectric thin films: Review of materials, properties, and applications
2. Processing, Structure, Properties, and Applications of PZT Thin Films
3. Thin-film piezoelectric MEMS
4. Applications of Modern Ferroelectrics
5. Ferroelectric memory
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A two-step wet etching process of PZT thin film with ultra-low undercut for MEMS applications;Sensors and Actuators A: Physical;2023-01
2. Study of the Pattern Preparation and Performance of the Resistance Grid of Thin-Film Strain Sensors;Micromachines;2022-06-01
3. Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate;Journal of Micromechanics and Microengineering;2021-12-28
4. A recycling strategy of ion beam removal and recoating of sol-gel film on fused silica surface;Optik;2021-09
5. Microstructure analysis of porous lead zirconate–titanate films;Journal of the American Ceramic Society;2021-08-11
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3