Research progress of electrical properties based on carbon nanotubes; interconnection
Author:
Affiliation:
1. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, P.R. China;
2. Shaanxi Key Laboratory of Intelligent Robots, Xi’an Jiaotong University, Xi’an, P. R. China
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://www.tandfonline.com/doi/pdf/10.1080/00150193.2020.1761697
Reference93 articles.
1. Carbon Nanotubes for Interconnects
2. Semiconductor Industry Association, International Technology Roadmap for Semiconductors, 2017-02-8 (2017). http://public.itrs.net/
3. Silicon-gate technology
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5. Copper interconnections and reliability
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