Nonlinear vibrational analysis and linearization error investigation in size-dependent resonant pressure microsensors-Reference-Cited by-同舟云学术

Nonlinear vibrational analysis and linearization error investigation in size-dependent resonant pressure microsensors

Published:2023-10-26 Issue: Volume: Page:1-18
ISSN:1539-7734
Container-title:Mechanics Based Design of Structures and Machines
language:en
Short-container-title:Mechanics Based Design of Structures and Machines

Author:

Karimzadeh Ali¹,Rahaeifard Masoud²

Affiliation:

1. Department of Mechanical Engineering, Faculty of Engineering, Fasa University, Fasa, Iran

2. Department of Mechanical Engineering, Faculty of Engineering, Ardakan University, Ardakan, Iran

Publisher

Informa UK Limited

Subject

Mechanical Engineering,Mechanics of Materials,Ocean Engineering,Condensed Matter Physics,Aerospace Engineering,Automotive Engineering,General Mathematics,Civil and Structural Engineering

Link

https://www.tandfonline.com/doi/pdf/10.1080/15397734.2023.2272681

Reference55 articles.

1. Elasto-Electrostatic Analysis of Circular Microplates Used in Capacitive Micromachined Ultrasonic Transducers

2. Vibration analysis of carbon nanotube mass sensors considering both inertia and stiffness of the detected mass

3. A Low-Power and Wide-Range MEMS Capacitive Sensors Interface IC Using Pulse-Width Modulation for Biomedical Applications

4. Design and Simulation of MEMS Capacitive Pressure Sensor Array for Wide Range Pressure Measurement

5. CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis

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