Author:
Banerji Saoni,Michalik Piotr,Fernández Daniel,Madrenas Jordi,Mola Albert,Montanyà Josep
Funder
Spanish Ministry of Science and Innovation and European Social Fund (ESF)
Agència de Gestió d’Ajuts Universitaris i de Recerca
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference23 articles.
1. Banerji S, Madrenas J, Fernandez D (2015, April 27–30) Optimization of parameters for CMOS MEMS resonant pressure sensors. Paper presented at 2015 Symposium on Design Test Integration and Packaging of MEMS and MOEMS (France), Montpellier (pp. 107–112)
2. Bao M, Heng Y, Yuancheng S, Yuelin W (2003) Squeeze-film air damping of thick hole-plate. Sens Actuators A 108:212–217. doi:
10.1016/S0924-4247(03)00263-2
3. Basu J, Bhattacharyya TK (2011) Micromechanical resonators for radio frequency communication applications. Microsyst Technol 17:1557–1580. doi:
10.1007/s00542-011-1332-9
4. Brand O, Fedder GK, Hierold C, Korvink JG, Tabata O (2005) CMOS-MEMS. In: Timme HJ (ed) CMOS based pressure sensors, vol 2. Wiley-VCH Verlag GmbH, Weinheim, pp 257–335
5. Brotz J (2004) Damping in CMOS-MEMS resonators. Master’s Project Report, Carnegie Mellon University
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献