Optical and physicochemical properties of hydrogenated silicon nitride thin films: Effect of the thermal annealing
Author:
Affiliation:
1. Département d’Electronique et des Télécommunications, Université Kasdi Merbah Ouargla, Ouargla, Algérie
Publisher
Informa UK Limited
Subject
Spectroscopy,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
https://www.tandfonline.com/doi/pdf/10.1080/00387010.2016.1262425
Reference38 articles.
1. Highly sensitive Mach–Zehnder interferometer biosensor based on silicon nitride slot waveguide
2. Comparative investigation of hydrogen bonding in silicon based PECVD grown dielectrics for optical waveguides
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4. a-SiNx:H Antireflective And Passivation Layer Deposited By Atmospheric Pressure Plasma
5. Surface passivation at low temperature of p- and n-type silicon wafers using a double layer a-Si:H/SiNx:H
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