1. College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou, PR China
2. Moganshan Diamond Research Center, De Qing, Hu Zhou, PR China
3. Diamond Joint Research Center for Zhejiang University, Technology and Tanghe Scientific and Technology Company, De Qing, Hu Zhou, PR China
4. Key Laboratory of Marine Materials and Related Technologies, Zhejiang Key Laboratory of Marine Materials and Protective Technologies, Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo, PR China
5. School of Engineering, University of Leicester, Leicester, UK
6. Surrey Ion Beam Center, University of Surrey, Guildford, UK
7. ZheJiang Haina Semiconductor Co., Ltd, Quzhou, PR China