Comparative study on structure and properties of ZnO thin films prepared by RF magnetron sputtering using pure metallic Zn target and ZnO ceramic target-Reference-Cited by-同舟云学术

Comparative study on structure and properties of ZnO thin films prepared by RF magnetron sputtering using pure metallic Zn target and ZnO ceramic target

Published:2018-12-10 Issue:1 Volume:36 Page:49-54
ISSN:0267-0844
Container-title:Surface Engineering
language:en
Short-container-title:Surface Engineering

Author:

Ye Wei¹,Fang Kun²

Affiliation:

1. School of Mechanical Engineering, Shaanxi University of Technology, Hanzhong, People’s Republic of China

2. Precision Electrical and Mechanical Division, Horological Research Institute of Light Industry, Xi’an, People’s Republic of China

Funder

Science and Technology Department of Shaanxi Province of China

Shaanxi Provincial Education Department Key Scientific Research Project of Key Laboratory of China

Shaanxi University of Technology Fund Project of China

Publisher

Informa UK Limited

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://www.tandfonline.com/doi/pdf/10.1080/02670844.2018.1555214

Reference28 articles.

1. Doping Ga effect on ZnO radio frequency sputtered films from a powder target

2. Substrate polarity and surface pretreatment temperature dependence of ZnO homoepitaxy

3. Crystallographic polarity effect of ZnO on thin film growth of pentacene

4. Polarity in GaN and ZnO: Theory, measurement, growth, and devices

5. Influence of crystallographic polarity on the opto-electrical properties of polycrystalline ZnO thin films deposited by magnetron sputtering

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigating the simultaneous effect of bias voltage and annealing on structural and optical properties of ZnO layer prepared by RF magnetron sputtering;Results in Optics;2024-02

2. High-quality dense ZnO thin films: work function and photo/electrochemical properties;Journal of Solid State Electrochemistry;2024-01-24

3. Vanadium promoted ZnO films: effects on optical and photocatalytic properties;Surface Engineering;2023-10-07

4. Development of robust YSZ thin-film electrolyte by RF sputtering and anode support design for stable IT-SOFC;Ceramics International;2023-10

5. Effects of Substrate Bias Voltage and Post-Annealing on Structure and Optical Properties of Zno Layer Prepared by Rf Magnetron Sputtering;2023