Synthesis of nanopowders in a PECVD reactor from organosilicon precursor-Reference-Cited by-同舟云学术

Synthesis of nanopowders in a PECVD reactor from organosilicon precursor

Published:2019-06-22 Issue:10 Volume:194 Page:978-982
ISSN:1042-6507
Container-title:Phosphorus, Sulfur, and Silicon and the Related Elements
language:en
Short-container-title:Phosphorus, Sulfur, and Silicon and the Related Elements

Author:

Fermi Y.¹^ORCID,Kihel M.¹,Sahli S.¹,Raynaud P.²

Affiliation:

1. Université Frères Mentouri de Constantine, Laboratoire Microsystèmes et Instrumentation, Faculté sciences de la technologie, Route de Ain El Bey, Constantine, Algérie;

2. Université Paul Sabatier, LAPLACE, CNRS, 118 Route de Narbonne, Toulouse cedex, France

Publisher

Informa UK Limited

Subject

Inorganic Chemistry,Organic Chemistry,Biochemistry

Link

https://www.tandfonline.com/doi/pdf/10.1080/10426507.2019.1631311

Reference23 articles.

1. Bioresorbable pressure sensors protected with thermally grown silicon dioxide for the monitoring of chronic diseases and healing processes

2. EFTEM study of plasma etched low-k Si-O-C dielectrics

3. Analysis of SiO x layers for silicon heterojunction solar cells

4. Investigation of amorphous SiOx layer on gold surface for Surface Plasmon Resonance measurements

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