Author:
Herth Etienne,Zeggari Rabah,Rauch Jean-Yves,Remy-Martin Fabien,Boireau Wilfrid
Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference22 articles.
1. Optimization of SiNX:H films deposited by PECVD for reliability of electronic, microsystems and optical applications;Herth;Microelectron. Reliab.,2010
2. Investigation of Optical and Chemical Bond Properties of Hydrogenated Amorphous Silicon Nitride for Optoelectronics Applications;Herth,2012
3. Charging-effects in RF capacitive switches influence of insulating layers composition;Lamhamdi;Microelectron. Reliab.,2006
4. Biosensing with SiO2-covered SPR substrates in a commercial SPR-tool;Ryken;Sensors Actuators B Chem.,2014
5. Optimization of Ohmic Contact and Adhesion on Polysilicon in MEMS-NEMS Wet Etching Process;Herth,2011
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31 articles.
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