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Silicon nanowires obtained by metal-assisted chemical etching for photonic applications

  • Published:2022-10-19 Issue:11-12 Volume:177 Page:1195-1208
  • ISSN:1042-0150
  • Container-title:Radiation Effects and Defects in Solids
  • language:en
  • Short-container-title:Radiation Effects and Defects in Solids

Author:

Leonardi Antonio Alessio12,Lo Faro Maria José12,Sciuto Emanuele34,Conoci Sabrina345,Fazio Barbara63ORCID,Irrera Alessia63

Affiliation:

1. Dipartimento di Fisica e Astronomia “Ettore Majorana”, Università degli studi di Catania, Catania, Italy

2. CNR-IMM UoS Catania, Istituto per la Microelettronica e Microsistemi, Catania, Italy

3. Lab SENS CNR, Beyond NANO, Messina, Italy

4. Dipartimento di Scienze Chimiche, Biologiche, Farmaceutiche, ed Ambientali, Università degli studi di Messina, Messina, Italy

5. CNR-IMM Istituto per la Microelettronica e Microsistemi, Zona Industriale, Catania, Italy

6. CNR-IPCF, Istituto per i Processi Chimico-Fisici, Messina, Italy

Publisher

Informa UK Limited

Subject

Condensed Matter Physics,General Materials Science,Nuclear and High Energy Physics,Radiation

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