Machining Stability Research of Soft-Brittle Crystals Lapping by Fixed-Abrasive Pad-Reference-Cited by-同舟云学术

Machining Stability Research of Soft-Brittle Crystals Lapping by Fixed-Abrasive Pad

Published:2022-07-28 Issue:1 Volume:229 Page:45-53
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Nan-nan Zhu¹²,Si-long Zhao³,Sheng-bin Zhang⁴,Feng-li Niu²,Yong-wei Zhu²

Affiliation:

1. Industrial Perception and Intelligent Manufacturing Equipment Engineering Research Center of Jiangsu Province, Nanjing Vocational University of Industry Technology, Nanjing, China

2. Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing University of Aeronautics and Astronautics, Nanjing, China

3. College of Mechanical Engineering, Nanjing Vocational University of Industry Technology, Nanjing, China

4. College of Mechanical and Electrical Engineering, Qingdao University, Qingdao, China

Funder

Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Natural Science Foundation of Shandong Province

Scientific Research Foundation Project of Nanjing Institute of Industry Technology

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2022.2074222

Reference13 articles.

1. Effect of alkaline slurries on nano machining CaF2crystal

2. Effect of chemical additive on fixed abrasive pad self-conditioning in CMP

3. Damage mechanisms during lapping and mechanical polishing CdZnTe wafers

4. Chemical mechanical polishing research of CdZnTe functional crystalline with soft brittle nature

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