Performance on lapping quartz glass by UV curing fixed abrasive pad with Gr2O3-diamond composite abrasives-Reference-Cited by-同舟云学术

Performance on lapping quartz glass by UV curing fixed abrasive pad with Gr2O3-diamond composite abrasives

Published:2024-01 Issue: Volume:169 Page:107926
ISSN:1369-8001
Container-title:Materials Science in Semiconductor Processing
language:en
Short-container-title:Materials Science in Semiconductor Processing

Author:

Wang Zhankui^ORCID,Wang Pengzhan,Dong Fengsong,Pang Minghua,Ma Lijie,Zhao Hongyuan,Su Jianxiu

Publisher

Elsevier BV

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Reference41 articles.

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2. On the mechanism of material removal by fixed abrasive lapping of various glass substrates;Cho;Wear,2013

3. Theoretical and experimental analysis of material removal and surface generation in novel fixed abrasive lapping of optical surface;Lin;J. Mater. Process. Technol.,2020

4. Effects of pressure and slurry on removal mechanism during the chemical mechanical polishing of quartz glass using ReaxFF MD;Guo;Appl. Surf. Scl.,2020

5. Fundamental performance of Magnetic Compound Fluid (MCF) wheel in ultra-fine surface finishing of optical glass;Jiao;Int. J. Mach. Tool Manufact.,2013

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3. The influence of the types of cluster composite abrasives on the performance of fixed abrasive pads in processing quartz glass;Materials Today Communications;2024-06

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