Simultaneous Formation of Non-coplanar Resonant Beams and Supporting Beams of Bulk Micromachining Resonant Accelerometers by Maskless Anisotropic Wet Etching-Reference-Cited by-同舟云学术

Simultaneous Formation of Non-coplanar Resonant Beams and Supporting Beams of Bulk Micromachining Resonant Accelerometers by Maskless Anisotropic Wet Etching

Published:2014-02-12 Issue:1 Volume:151 Page:133-147
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Han Jianqiang¹,Li Senlin¹,Li Yan¹,Feng Risheng¹,Yan Tianhong¹

Affiliation:

1. College of Mechanical & Electrical Engineering, China Jiliang University, Hangzhou 310018, China

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2014.900411

Reference23 articles.

1. Design, fabrication and testing of a novel MEMS resonator for mass sensing applications

2. Resonant silicon accelerometers in bulk micromachining technology-an approach

3. Sealed-cavity resonant microbeam accelerometer

4. Silicon resonant accelerometer with electronic compensation of input-output cross-talk

5. An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer

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