Research on Laser Trimming of Silicon MEMS Vibratory Gyroscopes-Reference-Cited by-同舟云学术

Research on Laser Trimming of Silicon MEMS Vibratory Gyroscopes

Published:2011-01 Issue:1 Volume:129 Page:37-44
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Zhao Xiaoguang¹,Zhou Bin¹,Zhang Rong¹,Chen Zhiyong¹

Affiliation:

1. a Department of Precision Instruments and Mechanology , Tsinghua University , Beijing, China

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2011.576898

Reference12 articles.

1. Error Sources in In-Plane Silicon Tuning-Fork MEMS Gyroscopes

2. A novel laser trimming technique for microelectronics

3. Laser Trimming of Micro Mirror Devices

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