Laser Trimming of Micro Mirror Devices

Author:

Hänel Jens,Keiper Bernd,Bleul Karsten,Kaufmann Christian,Bonitz Jens

Publisher

Wiley

Subject

General Medicine

Reference5 articles.

1. , , , “Location-Dependent Frequency Tuning of vibrating micromechanical resonators via Laser trimming”, Proc. of the IEEE Int. Frequency Control Symposium, 23-27 Aug, 2004, pp. 272–279.

2. , “SAW resonators frequency trimming by plasma etching”, European Frequency Time Forum, 5-7 March 1996, IEE Conference Publication No 418, pp. 155–158.

3. et al., “Precision frequency trimming of SAW and STW resonators using Xe+ heavy ion bombardment”, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Vol. 41, No. 5, 1994.

4. , , , , „Laser Trimming of a Silicon Tuning Fork Gyroscope”, Proc. Eurosensors, September 17-20, 2006, paper M2B-P15.

5. , , , , “MEMS based micro scanners: Components, Technologies and Applications”, Actuator 2006, 10th Intern. Conf. on New Actuators, 10-14 June, 2006, p.193.

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