Hysteresis Property of Tip-Tilt-Piston Micromirror Based on Tilt-and-Lateral Shift-Free Piezoelectric Unimorph Actuator-Reference-Cited by-同舟云学术

Hysteresis Property of Tip-Tilt-Piston Micromirror Based on Tilt-and-Lateral Shift-Free Piezoelectric Unimorph Actuator

Published:2014-01-02 Issue:1 Volume:150 Page:14-22
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Liu Wenjing¹²,Liao Wenjun²,Jia Kemiao²,Zhu Yiping²,Xie Huikai²,Wang Baoping¹,Tang Yongming¹

Affiliation:

1. a School of Electronics Science and Engineering , Southeast University , Nanjing , China

2. b Department of Electrical and Computer Engineering , University of Florida , Gainesville , FL , USA

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2014.873276

Reference26 articles.

1. Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror

2. A tip–tilt–piston micromirror with a double S-shaped unimorph piezoelectric actuator

3. A MEMS-based projection display

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