Effects of Annealing Temperature on Crystal Structure and Microstructure of PZT Thin Films (52/48) Prepared by RF Magnetron Sputtering-Reference-Cited by-同舟云学术

Effects of Annealing Temperature on Crystal Structure and Microstructure of PZT Thin Films (52/48) Prepared by RF Magnetron Sputtering

Published:2021-12-30 Issue:1 Volume:223 Page:173-184
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Thongrit Pakinee¹,Horprathum Mati²,Pengpat Kamonpan¹³,Bintachitt Patamas⁴

Affiliation:

1. Department of Physics and Materials Science, Faculty of Science, Chiang Mai University, Chiang Mai, Thailand;

2. National Electronics and Computer Technology Center (NECTEC), Pathumthani, Thailand;

3. Center of Excellence in Materials Science and Technology, Chiang Mai University, Chiang Mai, Thailand;

4. Department of Physics, Faculty of Science, Srinakharinwirot University, Bangkok, Thailand

Publisher

Informa UK Limited

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Ceramics and Composites,Control and Systems Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2021.1964296

Reference19 articles.

1. PZT-Based Piezoelectric MEMS Technology

2. P. Bintachitt, Local origin of macroscopic properties and patterning in PbZr1-xTixO3, Ph.D. dissertation, Pennsylvania State University, 2009.

3. SOLID SOLUTIONS OF Pb(Ti, Zr, Sn, Hf)O3

4. D. H. Do, Investigation of ferroelectricity and piezoelectricity in ferroelectric thin film capacitors using synchrotron x-ray microdiffraction, Ph.D. dissertation, University of Wisconsin-Madison, 2006.

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