Investigation of Coatings Formed by Thermal Oxidation on Monocrystalline Silicon-Reference-Cited by-同舟云学术

Investigation of Coatings Formed by Thermal Oxidation on Monocrystalline Silicon

Published:2024-01-02 Issue:1 Volume:240 Page:53-63
ISSN:1058-4587
Container-title:Integrated Ferroelectrics
language:en
Short-container-title:Integrated Ferroelectrics

Author:

Igamov B. D.¹^ORCID,Imanova G. T.²³⁴,Kamardin A. I.¹,Bekpulatov I. R.⁵^ORCID

Affiliation:

1. Scientific and Technical Center with a Design Bureau and Pilot Production of the Academy of Sciences of the Republic of Uzbekistan, Tashkent, Republic of Uzbekistan

2. Institute of Radiation Problems, Ministry of Science and Education Republic of Azerbaijan, Baku, Azerbaijan

3. UNEC Research Center for Sustainable Development and Green Economy Named after Nizami Ganjavi, Azerbaijan State University of Economics (UNEC), Baku, Azerbaijan

4. Khazar University, Department of Physics and Electronics, Baku, Azerbaijan

5. Karshi State University, Karshi, Uzbekistan

Publisher

Informa UK Limited

Link

https://www.tandfonline.com/doi/pdf/10.1080/10584587.2023.2296317

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