Arsenic bombardment of PMMA and microposit 23M
Author:
Affiliation:
1. a Department of Electronic and Electrical Engineering , University of Surrey , Guildford, Surrey , GU2 5XH , U.K.
Publisher
Informa UK Limited
Subject
General Engineering
Link
https://www.tandfonline.com/doi/pdf/10.1080/00337578608206110
Reference16 articles.
1. Namba , S. Proc. International Ion Eng. Congress–ISIAT, IPAT'83. Kyoto. Edited by: Takagi , T. pp.1533Japan: I.E.E.
2. Ion Implantation Techniques
3. Mural , J. J. Proc. International Ion Eng. Congress–ISIAT, IPAT'83. Kyoto. Edited by: Takagi , T. pp.1545Japan: I.E.E.
4. Molecular stopping powers and effect of chemical bonding in gaseous amine compounds
5. Ion bombardment of resists
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