Ion implantation for semiconductor processing
Author:
Publisher
Informa UK Limited
Subject
General Engineering
Link
http://www.tandfonline.com/doi/pdf/10.1080/00337578208222823
Reference18 articles.
1. Ion implantation in semiconductor device technology
2. Ion-implanted semiconductor devices
3. Electrical and optical properties of AgInS2
4. Silicon Production Applications of Ion Implantation
5. Device applications of ion beams
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