A phenomenological model of the fluence, flux and temperature dependence of amorphisation in heavy ion implanted semiconductors
Author:
Publisher
Informa UK Limited
Subject
Condensed Matter Physics,General Materials Science,Nuclear and High Energy Physics,Radiation
Link
http://www.tandfonline.com/doi/pdf/10.1080/10420159708212953
Reference17 articles.
1. Swanson, M. L., Parsons, J. R. and Hoelke, C. W. 1971.Radiation Effects in Semiconductors, Edited by: Corbett, J. W. and Watkins, G. D. 359London: Gordon and Breach.
2. Ion implantation in semiconductors—Part II: Damage production and annealing
3. Crystalline to amorphous transformation in ion‐implanted silicon: a composite model
4. Difficulties in deducing disordering mechanisms from experimental studies of disorder-ion fluence functions in ion irradiation of semiconductors
5. The influence of ion beam annealing on the accumulation of direct impact induced amorphisation
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1. The Avrami–Johnson–Mehl model and irradiation induced phase changes in silicon;Vacuum;1999-06
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